| Description | Grade
Impurities (Lquid Phase) |
MEGA
99.998% (N4.8) (Mol. PPM) |
Electronic
99.999% (N5.0) (Mol. PPM) |
|---|---|---|---|
| Sulphur Hexafluoride is a non-flammable, colourless, odourless gas. | Nitrogen | < 5 | < 1 |
| Oxygen | < 5 | < 0.5 | |
| Halocarbon 14 | < 5 | < 3 | |
| Moisture | < 2 | < 0.3 | |
| Hydrogen Flouride | < 0.1 | < 0.1 |
| Cylinder Size | Volume (Kg) | Cylinder Data | |
|---|---|---|---|
| B10st | 10 | Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / Volumes as listed – |
|
| B44st (A) | 45.8 | ||
| B50st | 52 |
| Phoenix Gases can supply any internationally recognised valve type. For Sulphur Hexaflouride the standard international valve types are as follows | |
|---|---|
| American | CGA 590 / DISS 716 |
| European | DIN 477 – 6 |
| Gas Data | |
|---|---|
| Mol. Weight | 146 |
| Boiling Point | -63.7°C |
| Density | 0.736 kg/m 3 |
| Boiling Point | 21 bar |
| Recommended Regulator |
|---|
| Single stage brass or stainless steel body with stainless steel internals.
Phoenix Gases has a variety of suitable handling equipment for this product – please enquire. |
| Typical Applications |
|---|
| Used in the dry etching of films. |