Phoenix Gases

Silane

Description Grade Impurities
(Gas Phase)
99.999% (N5.0)
(excluding H2)
(Vol. PPM)
Silane is a colourless gas with a repulsive odour at room temperature and atmospheric pressure. In its pure state it is spontaneously combustible in air but is indefinitely stable in metal containers.

Metals anlysis data is available on request.

Hydrogen * 50
Nitrogen 1
Oxygen + Argon 1
Carbon Monioxide 0.2
Carbon Dioxide 0.2
Hydrogen 1
Moisture 0.1
THC as methane 0.2
Other H/C 0.5
Trichlorosilane 0.5
Dichlorosilane 0.5
Disilane 0.5
Resistivity > 10,000 ohm.com * <10 ppm in aluminium cylinders
Cylinder Size Volume (Kg) Pressure (Bar) Cylinder Data
B10st up to 3 up to 165 Supplied as a high pressure gas in seamless steel or aluminium cylinders.

Standard size / Volumes as Listed.
Larger volumes available on request.

B44st (A) up to 13.2 up to 165
B50st / al up to 15 up to 165
Phoenix Gases can supply any internationally recognised valve type. For Silane the standard international valve types are as follows
American CGA 350 / DISS 632
European DIN 477 – 1
Gas Data
Atomic Weight 32.11
Boiling Point -111.5°C
Density 1.114 kg/cm3
Recommended Regulator
Single stage stainless steel body with stainless steel internals.

Phoenix Gases has a variety of suitable handling equipment for this product – please enquire.

Typical Applications
Used as a source of high purity silicon in the electroincs industry for thin film deposits and the formation of high purity silicon oxides.