Description | Grade Impurities (Gas Phase) |
99.999% (N5.0) (excluding H2) (Vol. PPM) |
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Silane is a colourless gas with a repulsive odour at room temperature and atmospheric pressure. In its pure state it is spontaneously combustible in air but is indefinitely stable in metal containers.
Metals anlysis data is available on request. |
Hydrogen | * 50 |
Nitrogen | 1 | |
Oxygen + Argon | 1 | |
Carbon Monioxide | 0.2 | |
Carbon Dioxide | 0.2 | |
Hydrogen | 1 | |
Moisture | 0.1 | |
THC as methane | 0.2 | |
Other H/C | 0.5 | |
Trichlorosilane | 0.5 | |
Dichlorosilane | 0.5 | |
Disilane | 0.5 | |
Resistivity > 10,000 ohm.com | * <10 ppm in aluminium cylinders |
Cylinder Size | Volume (Kg) | Pressure (Bar) | Cylinder Data | |
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B10st | up to 3 | up to 165 | Supplied as a high pressure gas in seamless steel or aluminium cylinders.
Standard size / Volumes as Listed. |
|
B44st (A) | up to 13.2 | up to 165 | ||
B50st / al | up to 15 | up to 165 |
Phoenix Gases can supply any internationally recognised valve type. For Silane the standard international valve types are as follows | |
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American | CGA 350 / DISS 632 |
European | DIN 477 – 1 |
Gas Data | |
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Atomic Weight | 32.11 |
Boiling Point | -111.5°C |
Density | 1.114 kg/cm3 |
Recommended Regulator |
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Single stage stainless steel body with stainless steel internals.
Phoenix Gases has a variety of suitable handling equipment for this product – please enquire. |
Typical Applications |
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Used as a source of high purity silicon in the electroincs industry for thin film deposits and the formation of high purity silicon oxides. |