| Description | Grade Impurities (Liquid Phase) |
99.99% (N4.0) (Vol. PPM) |
99.999% (N5.0) (Vol. PPM) |
|---|---|---|---|
| Boron Trichloride is a colourless gas, which fumes in the presence of moist air. It has a choking odour. |
Nitrogen | < 40 | < 2 |
| Oxygen | < 20 | < 1 | |
| Carbon Monoxide | < 20 | < 0.2 | |
| Carbon Dioxide | – | < 0.2 | |
| Chlorine | < 5 | < 0.2 | |
| Phosgene | < 5 | < 0.5 | |
| Hydrogen chloride | – | < 1 | |
| Mehtane | – | < 0.5 |
|
Metals
Analysis N5.0 Grade only |
Impurity | Intergas Spec. (PPM wt) |
Impurity | Intergas Spec. (PPM wt) |
|---|---|---|---|---|
| Ag | 0.1 | Cu | 0.01 | |
| Al | 0.05 | Fe | 0.1 | |
| As | 0.03 | K | 0.05 | |
| Ba | 0.01 | Li | 0.01 | |
| Bi | 0.01 | Mg | 0.02 | |
| Ca | 0.02 | Mn | 0.01 | |
| Cd | 0.01 | Na | 0.1 | |
| Co | 0.01 | Ni | 0.01 | |
| Cr | 0.02 | Pb | 0.01 | |
| Sb | 0.01 | Si | 0.5 | |
| Zn | 0.05 | – | – |
| Cylinder Size | Volume (Kg) | Cylinder Data | |
|---|---|---|---|
| B10st | 12 | Supplied as a liquefied gas in seamless steel cylinders.
Standard sizes / Volumes as listed – |
|
| B44st (A) | 50 | ||
| B50st | 60 |
| RAHANGI GAS can supply any internationally recognised valve type. For Boron Trichloride the standard international valve types are as follows | |
|---|---|
| American | CGA 660 / DISS 634 |
| European | DIN 477 – 8 |
| Gas Data | |
|---|---|
| Mol. Weight | 117.17 |
| Boiling Point | 12.4°C |
| Density | 1.37 kg/m 3 |
| Vapour Pressure | 1.07 bar |
| Recommended Regulator |
|---|
| Phoenix Gases recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details. |
| Typical Applications |
|---|
| Common etch gas for thin film applications in Aluminium and Ploysilicon. |