| Description | Grade Impurities (Liquid phase) |
Electronic 99.97% (N3.7) (Mol. PPM) |
VLSI 99.997% (N4.7) (Mol. PPM) |
Sigma 3 99.999% (N5.0) (Mol. PPM) |
|---|---|---|---|---|
| Liquid chlorine is a clear amber-amber-coloured liquied and gaseous chlorine is a greenish yellow. It has a suffocating odour and irritates both the nose and throat. | Nitrogen | < 100 | < 10 | < 2 |
| Oxygen | < 10 | < 2 | < 1 | |
| THC | < 5 | < 0.2 | < 1 | |
| Carbon Dioxide | < 200 | < 7 | < 5 | |
| Moisture | < 5 | < 3 | < 1 | |
| Carbon Monoxide | – | – | < 1 | |
| Iron (Fe) | – | – | < 0.5 ppmw | |
| 1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn | ||||
| Cylinder Size | Volume (Kg) | Cylinder Data | |
|---|---|---|---|
| B44st (A) | 45.5 | Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / Volumes as listed – |
|
| B50st | 51.7 |
| Phoenix Gases can supply any internationally recognised valve type. For Chlorine the standard international valve types are as follows |
|
|---|---|
| American | CGA 660 / DISS 728 |
| European | DIN 477 – 8 |
| Gas Data | |
|---|---|
| Mol. Weight | 70.906 |
| Boiling Point | -34.05°C |
| Density | 2.980 g/cm3 |
| Vapour Pressure | 5.8 bar |
| Recommended Regulator |
|---|
| Phoenix Gases recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details. |
| Typical Applications |
|---|
| Plasma etching of aluminium and other metal layers. |