| Description | Grade Impurities (Liquid) |
Electronic 99.95% (N3.5) (Mol. PPM) |
VLSI 99.995% (N4.5) (Mol. PPM) |
Sigma 3 99.9995% (N5.5) (Mol. PPM) |
|---|---|---|---|---|
| Hydrogen Bromide is a colourless, toxic and corrosive gas at atmospheric pressure and room temperature. It is heavier than air, and fumes in moist air. | Nitrogen | < 320 | < 13 | < 2 |
| Oxygen | < 80 | < 6 | < 1 | |
| THC | – | < 5 | < 1 | |
| Carbon Dioxide | < 10 | < 8 | < 3 | |
| Moisture | < 5 | < 3 | < 1 | |
| Carbon Monoxide | < 10 | < 2 | < 1 | |
| Total Metals | – | < 10 ppmw | < 0.5 ppmw | |
| Iron (Fe) | – | < 10 ppmw | < 0.1 ppmw | |
| Nickel (Ni) | – | – | < 0.05 ppmw | |
| Chromium (Cr) | – | – | < 0.05 ppmw | |
| Other Metals 1 | – | – | < 0.01 ppmw | |
| 1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn | ||||
| Cylinder Size | Volume (Kg) | Cylinder Data | |
|---|---|---|---|
| B44st (A) | 45.5 | Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / Volumes as listed – |
|
| B50st | 51.7 |
| Phoenix Gases can supply any internationally recognised valve type. For Hydrogen Bromide the standard internationalvalve types are as follows | |
|---|---|
| American | CGA 330 / DISS 634 |
| European | DIN 477 – 8 |
| Gas Data | |
|---|---|
| Mol. Weight | 80.921 |
| Boiling Point | 66.7°C |
| Density | 3.330 g/cm3 |
| Vapour Pressure | 22.6 bar |
| Recommended Regulator |
|---|
| Phoenix Gases recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details. |
| Typical Applications |
|---|
| Plasma etching of polysilicon. |