| Description | Grade Impurities (Lquid Phase) |
99.999% (N5.0) (Vol. PPM) |
|---|---|---|
| At room temperature silicon Terachloride is a colourless, non flammable, corrosive liquid. | Donors (P, As, Sb) | < 3 ppba |
| Boron | < 0.1 ppba | |
| Aluminium | < 0.003 ppba | |
| Hydrocarbons | < 0.1 ppmw | |
| Carbon | < 0.3 ppma | |
| Trichlorosilane | < 100 ppmw |
| Cylinder Size | Volume (Kg) | Cylinder Data | |
|---|---|---|---|
| B10st | up to 12 | Supplied as a liquefied gas in seamless steel cylinders.
Standard sizes / Volumes as listed – |
|
| B50st | up to 60 |
| Phoenix Gases can supply any internationally recognised valve type. For Tetrachloride the standard international valve types are as follows |
|
|---|---|
| American | CGA 330 / DISS 636 |
| European | DIN 477 – 8 |
| Gas Data | |
|---|---|
| Atomic Weight | 169.9 |
| Boiling Point | 57.6°C |
| Density | 1.483 kg/m 3 |
| Vapour Pressure | 0.2 bar |
| Recommended Regulator |
|---|
| Phoenix Gases recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details. |
| Typical Applications |
|---|
| Used to plama etch metals and in epitaxial silicon applications. |