| Description | Grade Impurities
(Gas Phase) |
VLSI 99.9998% (N5.8)
(Vol. PPM) |
|---|---|---|
| Colourless, flammable, highly toxic gas with an odour of decaying fish. | Argon + Oxygen | < 1 |
| Arsine | < 1 | |
| Methane | < 0.5 | |
| Carbon Monoxide | < 0.5 | |
| Carbon Dioxide | < 0.5 | |
| Moisture | < 1 | |
| Nitrogen | < 1 |
| Cylinder Size | Volume (Kg) | Cylinder Data | |
|---|---|---|---|
| B44st (A) | 12.3 | Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinder.
Standard sizes / Volumes as listed – |
|
| B50st | 13.9 |
| Phoenix Gases can supply any internationally recognised valve type. For Phosphine the standard international valve types are as follows |
|
|---|---|
| American | CGA 350 / DISS 632 |
| European | DIN 477 – 1 |
| Gas Data | |
|---|---|
| Mol. Weight | 33.997 |
| Boiling Point | -87.7°C |
| Density | 1.40 kg/m 3 |
| Vapour Pressure | 41.9 bar |
| Recommended Regulator |
|---|
| Phoenix Gases recommends the use of manual or automatic gas cabinets for this product. Please contact us for further details. |
| Typical Applications |
|---|
| Used as a dopant in metal / polysilicon dielectrics. |